个人简介

肖德志，博士，东莞市特色人才（三类），广东海外博后。主要从事等离子体放电物理、装备以及工艺研究，半导体装备与集成电路工艺的开发如等离子体刻蚀、沉积与PVD镀膜的等离子体放电物理与工艺的研究开发，以及装备的设计开发等。在《Small》、《Journal of Applied physics》、《Vacuum》等国际著名期刊发表研究论文二十余篇，H因子17。主持国家自然科学基金，广东省基金，博后面上与国家重点实验室开放课题等项目。担任《Vacuum》、《iScience》等SCI期刊审稿人。

教育背景

2007.09－2011.07山东师范大学 应用物理 本科

2011.09－2014.07 中科院等离子体所 等离子体物理 硕士

2018.09－2021.10香港城市大学 应用物理 博士

工作经历

2014.07－2018.07北方华创微电子装备有限公司 射频技术leader

2021.08－2022.05 厦门三安集成电路有限公司 高级工程师

2022.05－2024.06 松山湖材料实验室 博士后

2024.07－2024.10 东莞聚润科技服务有限公司 技术总监

2024.10－至今 yl23411永利集团特聘副研究员

科学研究

（1）承担的研究项目

1. 脉冲空心阴极等离子体调控多孔载体上硒化钼表面效应及其析氢机理研究，国家自然科学基金青项目年，2025-2027，30万元，主持.

2. 面向GaN器件的脉冲偏压调制等离子体浸没离子注入的实验与机理研究，博后面上，2022-2024，8万元，主持。

3. 超高功率密度脉冲阴极弧放电锂电负极材料快速等离子体碳包覆研究，广东省基础与应用基础研究基金项目，2022-2025，10万元，主持.

4. 高功率脉冲直流驱动管道等离子体放电模拟与诊断实验研究，电力设备电气绝缘国家重点实验室(西安交通大学) 开放课题，2023-2024，8万元，主持.

（2）发表的学术论文和著作

[1]. Dezhi Xiao, Chuyang Lin, Xinyu Wang, Xiubo Tian, High-voltage pulsed-DC driven low-pressure hollow-cathode plasma CVD synthesis of carbon-coated silicon for lithium-ion batteries, (2026),Vacuum, 247:115158.

[2]. Yuzheng Wu¹, Xiaoxue Ren¹, Dezhi Xiao¹, Pei Liu, You Ke, Wenqiang Cui, Paul K. Chu, Huaiyu Wan, Sacrificing Knight for Pawn-Queen Promotion: Sonosensitive Nano-Xanthiums Orchestrate NO to Retain H₂O₂ for Antibiofilm Therapy, Advanced Material (2025), 38:e21809.

[3]. Dezhi Xiao, Xinyu Wang, Pengli Jin, Cheng Cheng, Xiubo Tian, Combined plasma diagnostic approaches for characterization of pulsed-DC driven hollow cathode discharge in a metal tube based on current-voltage characteristics, Langmuir probe, and optical emission spectroscopy, Vacuum, (2025) 240:114472.

[4]. Jinwei Zhang, Xiaolin Zhang, Junmin Xu, Xinyue Li, Dezhi Xiao, Zhixia Duan, Han Zhou, Xinchang Wang, Paul K. Chu, 3D-Printed KVPO4F/rGO Aerogel Electrodes as High-Performance 5V-Class Cathode for Advanced Potassium-Ion Battery, Small, (2025), 202505135

[5]. Dezhi Xiao, Pengli Jin, Xinyu Wang, Hao Zhang, Xiubo Tian, Paul K. Chu, Modeling and experimental comparison of pulsed-DC driven low-pressure plasma discharge in a metal tube, Current Applied Physics, (2024), 61: 47-54.

[6]. Xinyu Wang, Pengli Jin, Dezhi Xiao, Yan Lu, Xiubo Tian, Interlayer design for strong adhesion in the double-layer flexible copper clad laminate via HiPIMS deposition, Applied Surface Science, (2024) 670:160697.

[7]. Pengli Jin, Xiubo Tian, Chunzhi Gong, Benfu Wang, Tianshi Hu, Xinyu Wang, Dezhi Xiao, Cu-O-Si-C interface-induced high-adhesion and anticorrosion of the DLC coatings on inner wall of copper tube prepared by PECVD, Surface & Coatings Technology, (2024),484: 130869.

[8]. Jin pengli, Dezhi Xiao*, Xiubo Tian, Chunzhi Gong, Xinyu Wang, Synergistically tailoring the distribution of precursor gas for uniform internal DLC coating of long tub, Surface & Coatings Technology, (2023), 466:15.

[9]. Yu zheng Wu¹, Dezhi Xiao¹, Pei Liu, Qing Liao, Qingdong Ruan, Chao Huang, Liangliang Liu, Dan Li, Xiaolin Zhang, Wei Li, Kaiwei Tang, Zhengwei Wu, Guomin Wang, Huaiyu Wang, and Paul K. Chu, Nanostructured Conductive Polypyrrole for Antibacterial Components in Flexible Wearable Devices, Research , (2023), 6:0074.

[10] Dan Li, et al., Dezhi Xiao, et al., Paul K. Chu, Dynamic active sites on plasma engraved Ni hydroxide for enhanced electro-catalytic urea oxidation, Journal of Energy Chemistry, (2022),71: 150-158.

[11]. Ying Wang, Cheuk Kai Gary Kwok , Dezhi Xiao, Jiuzhou Zhu, Xingyu Shu, Shaoping Liu, K.M Yu, Improving the p–type conductivity of Cu2O thin films by Ni doping and their heterojunction with n–ZnO, Applied Surface Science, (2022), 590:15.

[12]. Dezhi Xiao, De-Liang Bao, Xiongyi Liang, Ying Wang, Jie Shen , Cheng Cheng, Paul K. Chu, Experimental and theoretical investigation of the control and balance of active sites on oxygen plasma-functionalized MoSe2 nanosheets for efficient hydrogen evolution reaction, App. Catal. B-Environ., (2021), 288:119983.

[13]. Dezhi Xiao, Qingdong Ruan, De-Liang Bao, Yang Luo, Chao Huang, Siying Tang, Jie Shen, Cheng Cheng, and Paul K. Chu, Effects of Ion Energy and Density on the Plasma Etching-Induced Surface Area, Edge Electrical Field, and Multivacancies in MoSe2 Nanosheets for Enhancement of the Hydrogen Evolution Reaction, Small, (2020) 25: 2001470.

[14]. Dezhi Xiao, et al. “Atomic-Scale Intercalation of Graphene Layers into MoSe2 Nanoflower Sheets as a Highly Efficient Catalyst for Hydrogen Evolution Reaction”, ACS Appl. Mater. Interfaces12, 2460-2468, (2020).

[15]. Dezhi Xiao, Qingdong Ruana , Liangliang Liua , Jie Shenb , Cheng Chengb , Paul K. Chu, Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation, Surface & Coatings Technology, (2020),400: 126252.

[16]. Yang Luo,Yinghong Wu, Chao Huang ,Dezhi Xiao, et al. Graphite felt incorporated with MoS2/rGO for electrochemical detoxification of high-arsenic fly ash, Chemical Engineering Journal, (2020),15: 122763.

[17]. Yang Luo, Yinghong Wu, Donghai Wu, Chao Huang, Dezhi Xiao, et al. NiFe-Layered Double Hydroxide Synchronously Activated by Heterojunctions and Vacancies for the Oxygen Evolution Reaction”, ACS Appl. Mater. Interfaces, (2020),12: 38.

[18]. Chao Huang, Biao Zhang,Yang Luo,Dezhi Xiao, et al., A hybrid Co NPs@CNT nanocomposite as highly efficient electrocatalyst for oxygen evolution reaction, Applied Surface Science, (2020),30 145155.

[19]. Yang Luo, Yinghong Wu, Dezhi Xiao, et al. Paul K .Chu, “Al2O3 coating for densification of SiC ceramics and sintering kinetics”, Surface & Coatings Technology, (2019), 25: 374.

[20]. Dezhi Xiao, Cheng Cheng, Jie Shen, Yan Lan, Hongbing Xie, Xingsheng Shu, Yuedong Meng, Jiangang Li, Paul K.Chu, Characteristics of atmospheric-pressure non-thermal N2 and N2/O2 gas mixture plasma jet”, Journal of Applied Physics, (2014), 115: 033303.

[21]. Dezhi Xiao, Cheng Cheng, Jie Shen, Yan Lan, Hongbing Xie, Xingsheng Shu, Yuedong Meng, Jiangang Li, Paul K.Chu, Electron density measurements of atmospheric-pressure non-thermal N-2 plasma jet by Stark broadening and irradiance intensity methods, Physics of Plasmas, (2014), 21(5): 53510-53516.

[22]. Dezhi Xiao, Cheng Cheng, Yan Lan, Guo Hua Ni, Jie Shen, Yue Dong Meng, and Paul K. Chu, Effects of Atmospheric-Pressure Nonthermal Nitrogen and Air Plasma on Bacteria Inactivation”, IEEE Transactions on Plasma Science, (2015), 44:11.

[23]. Jun ZHANG, Dezhi XIAO, et al. “Characteristics of Low Power CH4/Air Atmospheric Pressure Plasma Jet”, PLASMA SCIENCE & TECHNOLOGY, (2015),17: 202-208.

[24]. FeiFang, DezhiXiao, et al.“Construction of intumescent flame retardant and antimicrobial coating on cotton fabric via layer-by-layer assembly technology”,Surface & Coatings Technology, (2015), 25: 726.

（3）专利情况

1. 肖德志, 一种等离子体产生腔室和等离子体处理装置, 中国发明专利, 授权, 授权时间：2021.06.08.

2. 肖德志, 一种反应腔室和半导体加工装备, 中国发明专利, 授权，授权时间： 2022.07.19 .

3. 肖德志,王建龙,腔室内衬、等离子体反应腔室和等离子体设备, 中国发明专利, 授权，授权时间：2022.07.22.

4. 肖德志,琚里,反应腔室的磁场产生机构和反应腔室, 中国台湾发明专利, 授权，授权时间：2019.06.01.

5. 肖德志,赵晋荣, 线上监测系统及半导体加工装置,中国台湾发明专利, 授权，授权时间：2020.09.11.

教学工作

主讲课程

集成电路制造工艺

集成电路工艺专题实践项目

获奖与荣誉

（1）荣誉称号

东莞市特色人才（三类）

（2）指导技能大赛奖励

1.指导学生参加2025集成电路创新创业大赛获得全国一等奖1项，二等奖1项，三等奖一项。